JPS63145291U - - Google Patents
Info
- Publication number
- JPS63145291U JPS63145291U JP3836187U JP3836187U JPS63145291U JP S63145291 U JPS63145291 U JP S63145291U JP 3836187 U JP3836187 U JP 3836187U JP 3836187 U JP3836187 U JP 3836187U JP S63145291 U JPS63145291 U JP S63145291U
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- support
- support hole
- support device
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987038361U JPH047598Y2 (en]) | 1987-03-16 | 1987-03-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987038361U JPH047598Y2 (en]) | 1987-03-16 | 1987-03-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63145291U true JPS63145291U (en]) | 1988-09-26 |
| JPH047598Y2 JPH047598Y2 (en]) | 1992-02-27 |
Family
ID=30850533
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987038361U Expired JPH047598Y2 (en]) | 1987-03-16 | 1987-03-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH047598Y2 (en]) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5187771A (en) * | 1990-11-13 | 1993-02-16 | Tokyo Electron Sagami Limited | Heat processing apparatus utilizing a plurality of stacked heater holders |
| JPH1167424A (ja) * | 1997-08-20 | 1999-03-09 | Kokusai Electric Co Ltd | ヒータ支持装置 |
| JP2007502549A (ja) * | 2003-05-23 | 2007-02-08 | エムアールエル インダストリーズ | 高温拡散炉の加熱コイルの保持メカニズム |
| CN102300345A (zh) * | 2010-06-25 | 2011-12-28 | 山特维克热传动公司 | 用于加热元件线圈的支撑结构 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5367941U (en]) * | 1976-11-10 | 1978-06-07 | ||
| JPS6358493U (en]) * | 1986-10-03 | 1988-04-19 |
-
1987
- 1987-03-16 JP JP1987038361U patent/JPH047598Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5367941U (en]) * | 1976-11-10 | 1978-06-07 | ||
| JPS6358493U (en]) * | 1986-10-03 | 1988-04-19 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5187771A (en) * | 1990-11-13 | 1993-02-16 | Tokyo Electron Sagami Limited | Heat processing apparatus utilizing a plurality of stacked heater holders |
| JPH1167424A (ja) * | 1997-08-20 | 1999-03-09 | Kokusai Electric Co Ltd | ヒータ支持装置 |
| JP2007502549A (ja) * | 2003-05-23 | 2007-02-08 | エムアールエル インダストリーズ | 高温拡散炉の加熱コイルの保持メカニズム |
| CN102300345A (zh) * | 2010-06-25 | 2011-12-28 | 山特维克热传动公司 | 用于加热元件线圈的支撑结构 |
| JP2012009442A (ja) * | 2010-06-25 | 2012-01-12 | Sandvik Thermal Process Inc | 加熱エレメント・コイルの支持構造 |
| EP2400815A3 (en) * | 2010-06-25 | 2012-10-24 | Sandvik Thermal Process, Inc. | Support structure for heating element coil |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH047598Y2 (en]) | 1992-02-27 |